Lab

DeepTech Pilot Fab

Class-100 pilot fabrication line supporting 200mm silicon and 4-inch compound semiconductor wafers.

The DeepTech Pilot Fab is a Class-100 clean-room facility purpose-built for pre-production runs. It integrates lithography, deposition, etch and packaging in a single flow, and pairs with our packaging & test line for full device turnaround.

Key specifications

Cleanroom class: ISO 5 (Class 100)
Wafer sizes: 200mm Si / 4-inch GaN & GaAs
Monthly capacity: 400 wafers
Toolset: DUV stepper, PECVD, ICP-RIE, sputter, thermal

Linked capabilities

Semiconductor Fabrication

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